US Patent Issued to Robert Bosch on Oct. 20 for "Method for producing a micro-electromechanical oscillatory system and piezoelectric micromachined ultrasonic transducer" (German Inventors)

ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,772,735, issued on Oct. 20, was assigned to Robert Bosch GmbH (Stuttgart, Germany).

"Method for producing a micro-electromechanical oscillatory system and piezoelectric micromachined ultrasonic transducer" was invented by Timo Schary (Aichtal-Neuenhaus, Germany), Johannes Baader (Haslach, Germany) and Reinhold Roedel (Reutlingen, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method for producing a micro-electromechanical oscillatory system. A carrier substrate with a first surface is provided and a first passivation layer is applied onto the first surface. A first polysilicon layer grows on top of the first passivation layer and/or the first ...