ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,703,623, issued on Aug. 11, was assigned to Robert Bosch GmbH (Stuttgart, Germany).
"Micromechanical z-acceleration sensor with reference electrode" was invented by Johannes Classen (Reutlingen, Germany).
According to the abstract* released by the U.S. Patent & Trademark Office: "A micromechanical capacitive z-acceleration sensor. The sensor includes a substrate with a main extension plane and a layer sequence which is parallel to the extension plane, and includes a first polysilicon layer, a second polysilicon layer, and a third polysilicon layer, with a movable micromechanical structure having a seismic mass which can be deflected in a straight line in a first direction perpendicul...