US Patent Issued to RC-Tech on Oct. 27 for "Chemical supply device for use in semiconductor manufacturing process" (South Korean Inventors)

ALEXANDRIA, Va., Oct. 27 -- United States Patent no. 12,777,873, issued on Oct. 27, was assigned to RC-Tech Co. Ltd. (Yongin-si, South Korea).

"Chemical supply device for use in semiconductor manufacturing process" was invented by Tae Hwa Lim (Yongin-si, South Korea) and Myeong Mun Kim (Incheon, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "According to various embodiments, there is provided a chemical supply device for use in a semiconductor manufacturing process, the chemical supply device including: a bubbler configured to contain a chemical solution to be used in a semiconductor manufacturing process and to evaporate the chemical solution; a constant temperature bath configured to accommodat...