US Patent Issued to RC-Tech on June 23 for "Bubbler for use in semiconductor manufacturing process" (South Korean Inventors)

ALEXANDRIA, Va., July 15 -- United States Patent no. 12,661,602, issued on June 23, was assigned to RC-Tech Co. Ltd. (Yongin-si, South Korea).

"Bubbler for use in semiconductor manufacturing process" was invented by Tae Hwa Lim (Yongin-si, South Korea) and Myeong Mun Kim (Incheon, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "There is provided a chemical supply device for use in a semiconductor manufacturing process, the chemical supply device including a bubbler, wherein the bubbler includes: a lower support surface including a lower concave portion; a side surface smoothly connected to the lower support surface through a corner curved portion; an upper surface extended from the side surface; a...