ALEXANDRIA, Va., Feb. 24 -- United States Patent no. 12,562,346, issued on Feb. 24, was assigned to PSK Inc. (Gyeonggi-do, South Korea).
"Apparatus for processing substrate" was invented by Kwang-Sung Yoo (Gyeonggi-do, South Korea), Geon-Jong Kim (Gyeonggi-do, South Korea) and Tae-Hwan Youn (Gyeonggi-do, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "The present invention provides an apparatus for processing a substrate. The apparatus for processing a substrate may comprise: a first housing; a second housing combined with the first housing to define an internal space; a rotation coupling part for O fastening the first housing and the second housing to each other such that one of the first housing...