US Patent Issued to Plasma-Therm NES on June 30 for "Virtual shutter in ion beam system" (Florida, California Inventors)

ALEXANDRIA, Va., July 16 -- United States Patent no. 12,671,062, issued on June 30, was assigned to Plasma-Therm NES LLC (St. Petersburg, Fla.).

"Virtual shutter in ion beam system" was invented by Sarpangala Hariharakeshava Hegde (Fremont, Calif.), Armin Baur (Largo, Fla.), Wei-Hua Hsiao (St. Petersburg, Fla.) and Russell Westerman (Land O' Lakes, Fla.).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure provides a method of processing a substrate within an ion beam system. The substrate has a top surface that has a plurality of features, an edge and a bottom surface. The substrate is placed on a wafer stage and an energetic particle beam having a radial flux distribution over at least a po...