US Patent Issued to NuFlare Technology on Sept. 8 for "Beam detector, multi-charged-particle-beam irradiation apparatus, and adjustment method for beam detector" (Japanese Inventors)

ALEXANDRIA, Va., Sept. 8 -- United States Patent no. 12,731,759, issued on Sept. 8, was assigned to NuFlare Technology Inc. (Yokohama, Japan).

"Beam detector, multi-charged-particle-beam irradiation apparatus, and adjustment method for beam detector" was invented by Yasutaka Sato (Hachioji, Japan), Hironori Mizoguchi (Yokohama, Japan), Toru Hinata (Yokohama, Japan), Toshiki Kimura (Yokohama, Japan) and Kiminobu Akeno (Yokohama, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "In one embodiment, a beam detector includes a first aperture plate including a first passage hole, a second aperture plate including a second passage hole that allows a single detection target beam passing through the first passage ...