US Patent Issued to NuFlare Technology on Oct. 6 for "Charged particle beam writing apparatus, discharge detection method, and discharge detection apparatus" (Japanese Inventors)

ALEXANDRIA, Va., Oct. 6 -- United States Patent no. 12,755,930, issued on Oct. 6, was assigned to NuFlare Technology Inc. (Yokohama, Japan).

"Charged particle beam writing apparatus, discharge detection method, and discharge detection apparatus" was invented by Tatsuya Murofushi (Gotenba, Japan), Kuniaki Kawahara (Yokohama, Japan), Yasuo Sengoku (Yokohama, Japan), Ayako Tanaka (Kamakura, Japan) and Toru Ariizumi (Tama, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "In one embodiment, a charged particle beam writing apparatus includes a high-voltage power supply configured to apply an acceleration voltage for charged particles to an emission unit, a deflector configured to deflect a charged particle bea...