US Patent Issued to NuFlare Technology on July 28 for "Method for estimating cathode lifetime of electron gun, and electron beam writing apparatus" (Japanese Inventor)

ALEXANDRIA, Va., July 28 -- United States Patent no. 12,695,046, issued on July 28, was assigned to NuFlare Technology Inc. (Yokohama, Japan).

"Method for estimating cathode lifetime of electron gun, and electron beam writing apparatus" was invented by Nobuo Miyamoto (Yokohama, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method for estimating the cathode lifetime of an electron gun includes recording the change amount, per unit temperature increase of the cathode of an electron gun which emits an electron beam, with respect to a parameter value relating to the electron beam, to be recorded in relation to the usage time of the cathode, and estimating the lifetime of the cathode by one of estimating...