US Patent Issued to NuFlare Technology, NuFlare Technology America on Oct. 20 for "Charged particle beam writing apparatus and charged particle beam writing method" (Japanese, American Inventors)

ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,770,821, issued on Oct. 20, was assigned to NuFlare Technology Inc. (Yokohama, Japan) and NuFlare Technology America Inc. (Sunnyvale, Calif.).

"Charged particle beam writing apparatus and charged particle beam writing method" was invented by Yasuo Sengoku (Yokohama, Japan), Yoshikuni Goshima (Yokohama, Japan), John William Kay (Lagrangeville, N.Y.) and Chising Lai (Hopewell Junction, N.Y.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A charged particle beam writing apparatus according to one aspect of the present invention includes an electrode configured to deflect a charged particle beam, an amplifier configured to apply a deflection potential to the...