ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,699,202, issued on Aug. 4, was assigned to Nuctech Co. Ltd. (Beijing) and Tsinghua University (Beijing).
"Inspection system and inspection method" was invented by Zhiqiang Chen (Beijing), Li Zhang (Beijing), Qingping Huang (Beijing), Yong Zhou (Beijing), Hui Ding (Beijing), Xin Jin (Beijing) and Chao Ji (Beijing).
According to the abstract* released by the U.S. Patent & Trademark Office: "An inspection system, including: at least one ray source rotatable between at least two scanning positions around a rotation axis, and a rotation angle of at least one ray source between two adjacent scanning positions is greater than an angle of adjacent target spots of each ray source relative to t...