US Patent Issued to Northwestern University on June 23 for "Microchips for use in electron microscopes and related methods" (Illinois Inventors)

ALEXANDRIA, Va., July 15 -- United States Patent no. 12,665,163, issued on June 23, was assigned to Northwestern University (Evanston, Ill.).

"Microchips for use in electron microscopes and related methods" was invented by Vinayak P. Dravid (Glenview, Ill.), Xiaobing Hu (Evanson, Ill.) and Kunmo Koo (Skokie, Ill.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Method for fabricating a microchip are provided which may comprise forming a dopant mask layer on a front side surface of a silicon substrate having the front side surface and an opposing back side surface; removing a portion of the dopant mask layer according to a pattern to form a first exposed silicon region in the silicon substrate and a first unexp...