ALEXANDRIA, Va., May 19 -- United States Patent no. 12,635,479, issued on May 19, was assigned to NITERRA Co. LTD. (Nagoya, Japan).
"Substrate holder" was invented by Makoto Hino (Nagoya, Japan), Tetsuo Kitabayashi (Nagoya, Japan) and Hiromasa Shimojima (Nagoya, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "There is provided a substrate holder including: a ceramic base member, an electrode and a shaft. The ceramic base member is provided with: an annular projected part and a plurality of projected parts. A circular area of which diameter is not less than 0.4 times an inner diameter of the cylindrical part is provided on a center in an upper surface of the ceramic base member. A first envelope surface ...