US Patent Issued to NITERRA on Jan. 20 for "Joined body and electrostatic chuck" (Japanese Inventors)

ALEXANDRIA, Va., Jan. 20 -- United States Patent no. 12,528,131, issued on Jan. 20, was assigned to NITERRA Co. LTD. (Nagoya, Japan).

"Joined body and electrostatic chuck" was invented by Ryuichi Arakawa (Nagoya, Japan), Tomoo Tanaka (Nagoya, Japan) and Osamu Yoshimoto (Nagoya, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A joined body includes a first member, a second member, and a joining portion disposed therebetween and joining the first member and the second member. The joining portion includes a first joining layer on a side toward the first member and formed of a first joining material, a second joining layer on a side toward the second member and formed of a second joining material, and a met...