US Patent Issued to NITERRA on Aug. 4 for "Alumina-based sintered body and electrostatic chuck" (Japanese Inventors)

ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,698,238, issued on Aug. 4, was assigned to NITERRA Co. LTD. (Nagoya, Japan).

"Alumina-based sintered body and electrostatic chuck" was invented by Motoki Hotta (Nagoya, Japan), Takayuki Matsuoka (Nagoya, Japan) and Takamichi Ogawa (Nagoya, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "In an alumina-based sintered body containing alumina (Al2O3) as a main component and containing magnesia (MgO) whose content with respect to a content of the alumina is 0.00 mol %greater thanMgOless than equal to0.20 mol %, a density is 3.96 g/cm3 or greater, and a standard deviation of grain sizes of alumina crystal grains is smaller than 4.0 micro metre."

The pate...