US Patent Issued to Nikon on Nov. 3 for "Systems and methods for measuring height properties of surfaces" (Arizona Inventors)

ALEXANDRIA, Va., Nov. 3 -- United States Patent no. 12,782,118, issued on Nov. 3, was assigned to Nikon Corp. (Tokyo).

"Systems and methods for measuring height properties of surfaces" was invented by Eric Peter Goodwin (Oro Valley, Ariz.) and Goldie Lynne Goldstein (Oro Valley, Ariz.).

According to the abstract* released by the U.S. Patent & Trademark Office: "The problem of measuring height properties (for instance, for aspheric optical components) is addressed by systems and methods that employ heterodyne optical interferometry to detect a plurality of interference patterns corresponding to a plurality of orientations of the surface and that determine a height property (such as a mid-spatial frequency spectrum or topography) of the sur...