US Patent Issued to NGK INSULATORS on Sept. 8 for "Plug, method of manufacturing plug, and member for semiconductor manufacturing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., Sept. 8 -- United States Patent no. 12,733,429, issued on Sept. 8, was assigned to NGK INSULATORS Ltd. (Nagoya-City, Japan).

"Plug, method of manufacturing plug, and member for semiconductor manufacturing apparatus" was invented by Hideaki Hashimoto (Nisshin, Japan), Masashi Ono (Nagoya, Japan) and Michihiro Ashida (Nagoya, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A plug includes a plug body, a spiral gas flow path that is provided in the plug body and that extends from a lower surface of the plug body to an upper surface, and at least one branch path that branches from a position on the spiral gas flow path and that opens on an outer circumferential surface of the plug body or t...