US Patent Issued to NGK INSULATORS on Sept. 22 for "Wafer placement table including a space layer" (Japanese Inventors)

ALEXANDRIA, Va., Sept. 24 -- United States Patent no. 12,744,192, issued on Sept. 22, was assigned to NGK INSULATORS Ltd. (Nagoya-City, Japan).

"Wafer placement table including a space layer" was invented by Ryuji Tamura (Nagoya-City, Japan), Ikuhisa Morioka (Handa-City, Japan), Hiroya Sugimoto (Chiryu-City, Japan) and Keita Mine (Chita-District, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A wafer placement table includes a ceramic plate, a cooling plate, a space layer, and a space layer forming portion. The ceramic plate has a wafer placement portion at an upper surface of the ceramic plate and incorporates electrodes. The cooling plate is joined to a lower surface of the ceramic plate and has a re...