US Patent Issued to NGK INSULATORS on Oct. 27 for "Member for semiconductor manufacturing apparatus with reduced abnormal electrical discharge" (Japanese Inventors)

ALEXANDRIA, Va., Oct. 27 -- United States Patent no. 12,777,890, issued on Oct. 27, was assigned to NGK INSULATORS Ltd. (Nagoya, Japan).

"Member for semiconductor manufacturing apparatus with reduced abnormal electrical discharge" was invented by Hiroshi Takebayashi (Handa, Japan) and Jyunya Waki (Handa, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A member for semiconductor manufacturing apparatus includes: a ceramic plate having a wafer placement surface on its upper surface and a built-in electrostatic electrode; a base plate provided on a lower surface of the ceramic plate, and configured to include a built-in refrigerant flow path; a passage provided from a lower surface of the base plate to the...