US Patent Issued to NGK INSULATORS on March 17 for "Member for semiconductor manufacturing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., March 17 -- United States Patent no. 12,580,163, issued on March 17, was assigned to NGK INSULATORS Ltd. (Nagoya, Japan).

"Member for semiconductor manufacturing apparatus" was invented by Taro Usami (Kakamigahara-City, Japan) and Tatsuya Kuno (Nagoya-City, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A member for semiconductor manufacturing apparatus includes: a ceramic plate having a wafer placement surface on an upper surface and a built-in electrode; a base plate provided on a lower surface of the ceramic plate, and configured to include built-in refrigerant flow paths; a through-hole that penetrates the base plate in an up-down direction; an insulating tube inserted into the thr...