US Patent Issued to NGK INSULATORS on June 23 for "Member for semiconductor manufacturing apparatus" (Japanese Inventor)

ALEXANDRIA, Va., July 15 -- United States Patent no. 12,665,527, issued on June 23, was assigned to NGK INSULATORS Ltd. (Nagoya, Japan).

"Member for semiconductor manufacturing apparatus" was invented by Yusuke Ogiso (Nagakute-City, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A member for semiconductor manufacturing apparatus of the present invention includes an AlN ceramic substrate with a surface provided with projections for wafer placement. At least part of an area, provided with no projection, of the AlN ceramic substrate has a surface layer region from the surface to a predetermined depth, and a base material region below the surface layer region. The predetermined depth is 5 micro metre or le...