US Patent Issued to NGK INSULATORS on June 23 for "Ceramic heater" (Japanese Inventors)

ALEXANDRIA, Va., July 15 -- United States Patent no. 12,666,503, issued on June 23, was assigned to NGK INSULATORS Ltd. (Nagoya, Japan).

"Ceramic heater" was invented by Masaki Ishikawa (Handa-City, Japan) and Hiroya Sugimoto (Chiryu-City, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A ceramic heater includes: a ceramic plate having a wafer placement surface on a surface thereof; zone heaters embedded in the ceramic plate so as to correspond to zones defined by dividing the surface of the ceramic plate into multiple sections; terminals connected to ends of the zone heaters via internal wires of the ceramic plate; terminal collection regions in which the plurality of terminals are collectively arrange...