US Patent Issued to NGK INSULATORS on July 7 for "Member for semiconductor manufacturing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., July 7 -- United States Patent no. 12,677,635, issued on July 7, was assigned to NGK INSULATORS Ltd. (Nagoya, Japan).

"Member for semiconductor manufacturing apparatus" was invented by Seiya Inoue (Handa-City, Japan), Tatsuya Kuno (Nagoya-City, Japan), Tomoki Nagae (Nagoya-City, Japan), Yusuke Ogiso (Nagakute-City, Japan) and Takuya Yoto (Nagoya-City, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A member for semiconductor manufacturing apparatus includes: a ceramic plate having a wafer placement surface on its upper surface; and a porous plug that is disposed in a plug insertion hole penetrating the ceramic plate in a up-down direction, and allows a gas to flow, wherein the porous pl...