US Patent Issued to NGK INSULATORS on July 21 for "Wafer placement table" (Japanese Inventors)

ALEXANDRIA, Va., July 21 -- United States Patent no. 12,690,417, issued on July 21, was assigned to NGK INSULATORS Ltd. (Nagoya-City, Japan).

"Wafer placement table" was invented by Seiya Inoue (Handa-City, Japan), Tatsuya Kuno (Nagoya-City, Japan), Masaki Ishikawa (Handa-City, Japan), Taro Usami (Kakamigahara-City, Japan), Ren Nakamura (Nagoya-City, Japan), Natsuki Hirata (Nagoya-City, Japan) and Kenji Yonemoto (Tokoname-City, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A wafer placement table includes a ceramic plate having a wafer placement surface on its top surface and incorporating an electrode; an electrically conductive plate joined to a bottom surface of the ceramic plate; a ceramic plate p...