ALEXANDRIA, Va., Feb. 17 -- United States Patent no. 12,557,183, issued on Feb. 17, was assigned to NGK INSULATORS Ltd. (Nagoya, Japan).

"Ceramic heater and method of manufacturing the ceramic heater" was invented by Takayoshi Akao (Kasugai, Japan) and Natsuki Hirata (Nagoya, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An electrostatic chuck heater includes a resistance heating element. A region of the resistance heating element from one end to another end of the resistance heating element is divided into a plurality of sections. Recessed grooves are provided in the respective sections along a longitudinal direction of the resistance heating element in a surface. In a connection portion between the ...