US Patent Issued to NGK INSULATORS on Aug. 4 for "Ceramic susceptor" (Japanese Inventors)

ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,700,577, issued on Aug. 4, was assigned to NGK INSULATORS Ltd. (Nagoya, Japan).

"Ceramic susceptor" was invented by Shingo Amano (Chita, Japan), Reon Takanoya (Handa, Japan) and Yuya Matsuo (Nagoya, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "There is provided a ceramic susceptor including a disk-shaped ceramic plate bonded body including an upper ceramic plate and a lower ceramic plate, an internal electrode embedded in the bonded body, and a purge gas groove, a vacuum suction groove, and a thermocouple insertion groove that are respectively provided on a bonding surface side of the upper ceramic plate or the lower ceramic plate. The ceramic pl...