US Patent Issued to NGK INSULATORS on Aug. 25 for "Wafer placement table" (Japanese Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,721,099, issued on Aug. 25, was assigned to NGK INSULATORS Ltd. (Nagoya-City, Japan).

"Wafer placement table" was invented by Reo Watanabe (Handa-City, Japan), Daisuke Tsunekawa (Handa-City, Japan) and Kanto Watanabe (Tsushima-City, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A wafer placement table includes: a ceramic substrate having a wafer placement surface and incorporating an electrode; a conductive embedded member electrically connected to the electrode; a conductive terminal with a female thread, the conductive terminal being electrically connected to the conductive embedded member, having a projection projecting from a surface, on an o...