ALEXANDRIA, Va., April 7 -- United States Patent no. 12,598,951, issued on April 7, was assigned to NGK INSULATORS Ltd. (Nagoya, Japan).
"Wafer placement table" was invented by Taro Usami (Kasamatsu-Town, Japan), Yohei Kajiura (Nagoya-City, Japan) and Keita Ikegami (Nagoya-City, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A wafer placement table includes: a ceramic plate having a wafer placement surface on its upper surface; a cooling plate provided on a lower surface of the ceramic plate; and a refrigerant flow path provided inside the cooling plate, wherein the refrigerant flow path includes a first portion and a second portion, the second portion continuing from the first portion and being divide...