ALEXANDRIA, Va., April 7 -- United States Patent no. 12,596,299, issued on April 7, was assigned to NGK INSULATORS Ltd. (Nagoya, Japan).
"EUV transmissive membrane" was invented by Toshikatsu Kashiwaya (Inazawa, Japan), Naoki Goriki (Kasugai, Japan), Shoji Tange (Kasugai, Japan) and Atsuo Kondo (Okazaki, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "There is provided an EUV transmissive membrane including: a main layer composed of metallic beryllium that has a first surface and a second surface; and a pair of surface layers provided on the first surface and the second surface of the main layer, each containing at least one fluoride selected from beryllium fluoride, beryllium fluoride nitride, berylliu...