US Patent Issued to NGK INSULATORS on April 7 for "Electrostatic chuck heater and film deposition apparatus" (Japanese Inventor)

ALEXANDRIA, Va., April 7 -- United States Patent no. 12,598,950, issued on April 7, was assigned to NGK INSULATORS Ltd. (Nagoya, Japan).

"Electrostatic chuck heater and film deposition apparatus" was invented by Tomohiro Hara (Handa-City, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "There is provided an electrostatic chuck heater including: a ceramic plate having a first surface for bearing a wafer on which a film is to be deposited, and a second surface opposite the first surface, and including ESC electrodes and a heater electrode which are built therein; a ceramic shaft which is attached to the second surface of the ceramic plate and which comprises an internal space for accommodating an ESC rod c...