US Patent Issued to NATIONAL YANG MING CHIAO TUNG UNIVERSITY on March 24 for "Three-dimensional source contact structure and fabrication process method of making the same" (Taiwanese Inventors)

ALEXANDRIA, Va., March 24 -- United States Patent no. 12,588,264, issued on March 24, was assigned to NATIONAL YANG MING CHIAO TUNG UNIVERSITY (Hsinchu City, Taiwan).

"Three-dimensional source contact structure and fabrication process method of making the same" was invented by Bing-Yue Tsui (Hsinchu City, Taiwan), Jui-Cheng Wang (Hsinchu City, Taiwan), Li-Tien Hsueh (Taipei City, Taiwan) and Jui-Tse Hsiao (Taichung City, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A three-dimensional source contact structure and fabrication process method thereof are provided. A lithography process and shallow trench process are sequentially performed to form a metal contact window in a power device. A source heavi...