US Patent Issued to NANOVERSE TECHNOLOGIES on Oct. 20 for "Method of semiconductor fabrication" (Oregon Inventors)

ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,772,784, issued on Oct. 20, was assigned to NANOVERSE TECHNOLOGIES LTD (Beaverton, Ore.).

"Method of semiconductor fabrication" was invented by Jeffrey Albelo (Beaverton, Ore.) and William Robertson (Beaverton, Ore.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method for using a smart EFEM in a semiconductor wafer process facility that incorporates at least one metrology testing device in a metrology unit positioned in operational proximity to the pre-alignment unit. The pre-alignment unit has a metrology chuck (platter) that two robotic arms shuttle the Si wafers onto, and that has a dimeter equivalent or larger than the diameter of the Si wafers b...