US Patent Issued to NANOVERSE TECHNOLOGIES on March 24 for "Systems and methods for concurrent measurements of interferometric and ellipsometric signals of multi-layer thin films" (Texas, Oregon Inventors)

ALEXANDRIA, Va., March 24 -- United States Patent no. 12,584,852, issued on March 24, was assigned to NANOVERSE TECHNOLOGIES LTD. (Beaverton, Ore.).

"Systems and methods for concurrent measurements of interferometric and ellipsometric signals of multi-layer thin films" was invented by Michael J. Darwin (Portland, Ore.) and Randy James (Aledo, Texas).

According to the abstract* released by the U.S. Patent & Trademark Office: "A system may include a broadband light source emitting polarized light that is polarized to two orthogonal polarization states, multiple beam splitters for combining and splitting the polarization states, and interferometric cell for creation of interference patterns with respect to a sample surface, lenses of appropr...