US Patent Issued to NANOVERSE TECHNOLOGIES on Aug. 4 for "Heterodyning optical phase measuring device for diffraction based overlay" (Oregon Inventor)

ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,698,963, issued on Aug. 4, was assigned to NANOVERSE TECHNOLOGIES LTD. (Beaverton, Ore.).

"Heterodyning optical phase measuring device for diffraction based overlay" was invented by Michael J. Darwin (Portland, Ore.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Methods and systems are provided for diffraction-based overlay (DBO) metrology of a multilayered sample. In one example, a method may include generating spatially structured light via a light source and an optical modulator, transmitting the spatially structured light onto the multilayered sample, detecting diffracted spatially structured light at one or more of a plurality of sensors, and estima...