US Patent Issued to Murata Manufacturing on Sept. 22 for "Method for manufacturing a transversely-excited film bulk acoustic resonator (XBAR)" (Utah, California Inventors)

ALEXANDRIA, Va., Sept. 24 -- United States Patent no. 12,744,512, issued on Sept. 22, was assigned to Murata Manufacturing Co. Ltd. (Nagaokakyo, Japan).

"Method for manufacturing a transversely-excited film bulk acoustic resonator (XBAR)" was invented by Andrew Kay (Provo, Utah), Albert Cardona (Santa Barbara, Calif.), Chris O'Brien (San Diego) and Akanksha Saha (Santa Barbara, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A process for fabricating a transversely-excited film bulk acoustic resonator (XBAR) and that XBAR are described. A sacrificial pillar is formed on a surface of a piezoelectric wafer and a highly conforming dielectric layer is deposited on the piezoelectric wafer to bury the sacrif...