US Patent Issued to Murata Manufacturing on April 14 for "Metal cavity for transversely-excited film bulk acoustic resonator (XBAR)" (California, Utah Inventors)

ALEXANDRIA, Va., April 15 -- United States Patent no. 12,603,639, issued on April 14, was assigned to Murata Manufacturing Co. Ltd. (Nagaokakyo, Japan).

"Metal cavity for transversely-excited film bulk acoustic resonator (XBAR)" was invented by Albert Cardona (Santa Barbara, Calif.), Andrew Kay (Provo, Utah) and Chris O'Brien (San Diego).

According to the abstract* released by the U.S. Patent & Trademark Office: "A process for fabricating a transversely-excited film bulk acoustic resonator (XBAR) having a metal cavity, and the fabricated XBAR include forming a conductor pattern including interleaved interdigital transducer (IDT) fingers on a piezoelectric wafer. Thein forming a metal layer on a substrate, the metal layer having a cavity. ...