US Patent Issued to MURATA MANUFACTURING on April 14 for "Low-impact out-of-plane motion limiter MEMS device" (Finnish Inventor)

ALEXANDRIA, Va., April 15 -- United States Patent no. 12,600,620, issued on April 14, was assigned to MURATA MANUFACTURING Co. LTD. (Nagaokakyo, Japan).

"Low-impact out-of-plane motion limiter MEMS device" was invented by Mikko Partanen (Vantaa, Finland).

According to the abstract* released by the U.S. Patent & Trademark Office: "A microelectromechanical device is provided that includes a mobile rotor and a fixed stator in a device plane. Moreover, a fixed wall defines a wall plane that is adjacent to the device plane and a motion limiter is provided to prevent the rotor from coming into direct physical contact with the fixed wall. The motion limiter includes a shock absorber that extends from the rotor to the stator and a fixed stopper s...