US Patent Issued to MKS on March 31 for "Hybrid high-power and broadband variable impedance modules" (South Korean, American, Canadian Inventors)

ALEXANDRIA, Va., March 31 -- United States Patent no. 12,592,361, issued on March 31, was assigned to MKS Inc. (Andover, Mass.).

"Hybrid high-power and broadband variable impedance modules" was invented by Linnell Martinez (San Jose, Calif.), JiAhn Lee (Yuseong-gu, South Korea), Alexander Jurkov (Calgary, Canada), Jaechul Jung (Sejong, South Korea) and Aaron Radomski (Conesus, N.Y.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A power supply system includes a RF generator, a matching network, and a control module. The matching network includes at least one mechanically variable impedance element and at least one electrically variable impedance element. The control module is coupled to the matching network a...