ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,703,006, issued on Aug. 11, was assigned to MITSUBISHI ELECTRIC Corp. (Tokyo).
"Method for manufacturing ultrasonic transducer, ultrasonic transducer, and distance measuring equipment" was invented by Yoshiaki Hirata (Tokyo) and Yoshitaka Kajiyama (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method for manufacturing an ultrasonic transducer comprises the following steps: A first SOI substrate including a first silicon film, a second silicon film, and an intermediate silicon oxide film sandwiched between the first silicon film and the second silicon film is prepared. A piezoelectric element is formed on the first silicon film of the first SOI ...