US Patent Issued to MICROPROGRAM INFORMATION on Sept. 22 for "Reticle-like sensing assembly" (Taiwanese Inventor)

ALEXANDRIA, Va., Sept. 24 -- United States Patent no. 12,743,018, issued on Sept. 22, was assigned to MICROPROGRAM INFORMATION Co. LTD. (Taichung, Taiwan).

"Reticle-like sensing assembly" was invented by Teng Yen Wu (Taichung, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A reticle-like sensing assembly comprises a main body, a sensing module, a power supply and a wireless charging receiver. The main body has a space therein; wherein the main body has a dimension identical to the real reticle to collecting various data which affects a reticle in a lithography process. The sensing module is received in the space of the main body to sense information related to the main body and compute the information...