ALEXANDRIA, Va., May 26 -- United States Patent no. 12,640,454, issued on May 26, was assigned to Menlo Microsystems Inc. (Irvine, Calif.).
"Waveguide structure" was invented by Sanchien Hong (Placentia, Calif.), Wei Ye (Westford, Mass.) and Hajime Terazawa (Carlsbad, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A coplanar waveguide (CPW) structure on a micro-electromechanical system (MEMS) device may comprise a glass device substrate that hosts a MEMS component on a first surface of the glass device substrate. The glass device substrate may have an associated set of metal layers that are used for fabrication of the MEMS component. The CPW structure may further comprise a glass cap having a top meta...