US Patent Issued to Massachusetts Institute of Technology on March 24 for "Parallel microcavity trimming by structured-laser illumination" (Massachusetts Inventors)

ALEXANDRIA, Va., March 24 -- United States Patent no. 12,585,147, issued on March 24, was assigned to Massachusetts Institute of Technology (Cambridge, Mass.).

"Parallel microcavity trimming by structured-laser illumination" was invented by Christopher Louis Panuski (Somerville, Mass.), Ian Robert Christen (Cambridge, Mass.) and Dirk Robert Englund (Brookline, Mass.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Methods and systems are described for precisely adjusting characteristics of microfabricated devices after device fabrication. The adjustments can be carried out in parallel on a plurality of the microfabricated devices. By carrying out the adjustment process, uniformity of feature sizes to a few pic...