ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,716,841, issued on Aug. 25, was assigned to Maruzen Petrochemical Co. LTD. (Tokyo).
"Method for evaluating resist polymer" was invented by Daisuke Tabata (Ichihara, Japan), Tatsuya Tsukamoto (Ichihara, Japan), Yoshiyuki Furuya (Ichihara, Japan) and Ryo Sato (Ichihara, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "[Problem to be solved] An object of the present invention is to provide a method for evaluating the dissolution properties of a resist polymer, which method allows for an easy evaluation without requiring complicated processes, and with a high sensitivity.[Solution] The method for evaluating the dissolution properties of a resist polymer...