ALEXANDRIA, Va., Sept. 8 -- United States Patent no. 12,729,107, issued on Sept. 8, was assigned to Lawrence Semiconductor Research Laboratory Inc. (Tempe, Ariz.).
"Anchor structure" was invented by Bishnu Prasanna Gogoi (Scottsdale, Ariz.) and Chantal Arena (Mesa, Ariz.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A semiconductor device is disclosed having one or more anchors that is configured to support a moving mass. The one or more anchors are formed in or on the semiconductor substrate. The one or more anchors are attached to the semiconductor substrate. An intermediate layer is formed overlying the semiconductor substrate. A device layer is formed overlying the intermediate layer. The device layer, ...