US Patent Issued to Lawrence Livermore National Security on June 9 for "Systems and methods for silicon microstructures fabricated via greyscale DRIE with SOI release" (California Inventors)

ALEXANDRIA, Va., June 9 -- United States Patent no. 12,652,976, issued on June 9, was assigned to Lawrence Livermore National Security LLC (Livermore, Calif.).

"Systems and methods for silicon microstructures fabricated via greyscale DRIE with SOI release" was invented by Jeremy Robert Gleick (Pleasanton, Calif.) and Razi-Ul Muhammad Haque (San Francisco).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure relates to a method for at least one of forming a part or modifying a part, and a system therefor. The method involves initially providing a planar structure having a first material layer disposed on a second material layer. A lithographic operation including greyscale printing is performe...