US Patent Issued to Lam Research Salzburg on July 14 for "Distribution body for distributing a process gas for treating a substrate by means of the process gas" (Austrian Inventors)

ALEXANDRIA, Va., July 14 -- United States Patent no. 12,680,164, issued on July 14, was assigned to Lam Research Salzburg GmbH (Salzburg-Gnigl, Austria).

"Distribution body for distributing a process gas for treating a substrate by means of the process gas" was invented by Andreas Gleissner (Dobriach, Austria), Marianne Kolitsch-Mataln (Villach, Austria) and Harald Okorn-Schmidt (Graz, Austria).

According to the abstract* released by the U.S. Patent & Trademark Office: "The disclosure relates to a distribution body for distributing a process gas relative to a substrate to treat the substrate by means of the process gas, comprising a distribution plate, at least one gas inlet channel, a plurality of gas distribution channels, and a plurali...