US Patent Issued to Lam Research on Sept. 8 for "Treated ceramic chamber parts" (California, Oregon Inventors)

ALEXANDRIA, Va., Sept. 8 -- United States Patent no. 12,729,166, issued on Sept. 8, was assigned to Lam Research Corp. (Fremont, Calif.).

"Treated ceramic chamber parts" was invented by Amir A. Yasseri (San Jose, Calif.), Hong Shih (Cupertino, Calif.), Satish Srinivasan (Newark, Calif.), Jeremiah Michael Dederick (Livermore, Calif.), Pankaj Hazarika (Sherwood, Ore.), Lin Xu (Fremont, Calif.) and Douglas Detert (Berkeley, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method for treating a ceramic component for use in a semiconductor processing chamber, wherein the ceramic component comprises a ceramic laminate comprising a base zone comprising a first dielectric ceramic material, a protective, where...