US Patent Issued to Lam Research on Sept. 29 for "Compact in-situ gas separator for substrate processing systems" (Oregon Inventors)

ALEXANDRIA, Va., Sept. 30 -- United States Patent no. 12,746,485, issued on Sept. 29, was assigned to Lam Research Corp. (Fremont, Calif.).

"Compact in-situ gas separator for substrate processing systems" was invented by Aleksey V. Altecor (Newberg, Ore.), Andrew Borth (Newberg, Ore.), Erica Sakura Strandberg Pohl (Sherwood, Ore.) and Chi-Jung Cheng (Wilsonville, Ore.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A gas separator includes a first distillation chamber and an evaporation chamber. A first liquid valve comprises an inlet in fluid communication with the first distillation chamber and an outlet in fluid communication with the evaporation chamber. A chiller is configured to chill the first distilla...