US Patent Issued to Lam Research on Sept. 22 for "Segmented gas distribution plate for high-power, high-pressure processes" (American, Indian Inventors)

ALEXANDRIA, Va., Sept. 24 -- United States Patent no. 12,744,189, issued on Sept. 22, was assigned to Lam Research Corp. (Fremont, Calif.).

"Segmented gas distribution plate for high-power, high-pressure processes" was invented by Gordon Peng (San Jose, Calif.), Mohammad Sohail Shaik (Andhra Pradesh, India), Craig Rosslee (San Jose, Calif.) and Dan Marohl (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A gas distribution plate for a substrate processing system includes an outer ring including a stepped interface on a radially inner surface thereof and N inner rings, where N is an integer greater than zero. At least one of the N inner rings is circumferentially segmented and includes an inner...