US Patent Issued to LAM RESEARCH on Sept. 22 for "Adapter plate to attach turbo pumps to process modules" (California Inventors)

ALEXANDRIA, Va., Sept. 24 -- United States Patent no. 12,742,454, issued on Sept. 22, was assigned to LAM RESEARCH Corp. (Fremont, Calif.).

"Adapter plate to attach turbo pumps to process modules" was invented by Bin Yuan (Monte Sereno, Calif.), Heather Pedersen (San Jose, Calif.) and Allan Ronne (Santa Clara, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A system comprises a process module, a pump, and an adapter plate. The process module processes a semiconductor substrate, has an opening at a lower end, and includes a poppet valve above the opening. The pump operates in conjunction with the poppet valve to evacuate gases from the process module. The adapter plate is arranged above the pump and bel...